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Title:
Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure
Authors:
Wang, Yinan; Liu, Yue; Zheng, Shu; Lin, Guoqiang; Lin
Affiliation:
AA(Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ()), AB(Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ()), AC(Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ()), AD(Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ()), AE()
Publication:
Journal of Plasma Physics, Volume 78, Issue 6, pp. 673-676
Publication Date:
12/2012
Origin:
CUP
Abstract Copyright:
(c) 2012: Copyright © Cambridge University Press 2012
DOI:
10.1017/S0022377812000566
Bibliographic Code:
2012JPlPh..78..673W

Abstract

A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable alpha mode in a range of 100 MHz of driven frequency.
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