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Title:
Dielectric hysteresis from transverse electric fields in lead zirconate titanate thin films
Authors:
Xu, Baomin; Ye, Yaohong; Cross, L. Eric; Bernstein, Jonathan J.; Miller, Raanan
Affiliation:
AA(Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802), AB(Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802), AC(Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802), AD(The Charles Stark Draper Laboratory, 555 Technology Square, Cambridge, Massachusetts 02139), AE(The Charles Stark Draper Laboratory, 555 Technology Square, Cambridge, Massachusetts 02139)
Publication:
Applied Physics Letters, Volume 74, Issue 23, id. 3549 (1999). (ApPhL Homepage)
Publication Date:
06/1999
Origin:
AIP
PACS Keywords:
Niobates, titanates, tantalates, PZT ceramics, etc., Domain structure; hysteresis, Polarization and depolarization, Sol-gel processing, precipitation, Piezoelectric and ferroelectric transducers, Transducers and transducer arrays for underwater sound; transducer calibration, Dielectric thin films
Abstract Copyright:
(c) 1999: American Institute of Physics.
DOI:
10.1063/1.124157
Bibliographic Code:
1999ApPhL..74.3549X

Abstract

Excellent symmetric dielectric hysteresis is observed from lead zirconate titanate (PZT) thin films using transverse electric fields driven by interdigitated surface electrodes. The 1-μm-thick PZT films with a Zr/Ti ratio of 52/48 are prepared on ZrO2 buffered, 4-in.-diam silicon wafers with a thermally grown SiO2 layer. Both the ZrO2 buffer layer and PZT film are deposited by using a similar sol-gel processing. Remanent polarization of about 20 μC/cm2 with coercive field less than 40 kV/cm is obtained as measured using a triangle wave at 50 Hz. Thicker films are being developed and retention for the transversely polarized state is currently under study. One of the objectives of this study is to develop a large array of d33-driven unimorph sensing elements for a high-resolution acoustic imaging system.
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