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Title:
A Powerful Soft X-ray Source for X-ray Lithography Based on Plasma Focusing
Authors:
Bogolyubov, E. P.; Bochkov, V. D.; Veretennikov, V. A.; Vekhoreva, L. T.; Gribkov, V. A.; Dubrovskii, A. V.; Ivanov, Yu P.; Isakov, A. I.; Krokhin, O. N.; Lee, P.; Lee, S.; Nikulin, V. Ya; Serban, A.; Silin, P. V.; Feng, X.; Zhang, G. X.
Affiliation:
AA(All-Russia Research Institute of Automatics, Moscow, Russia), AB(Scientific Production Corporation "Plasma", Ryazan, 390023, Russia), AC(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AD(St. Petersburg State Technical University, St. Petersburg, 195251, Russia), AE(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AF(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AG(All-Russia Research Institute of Automatics, Moscow, Russia), AH(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AI(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AJ(Nanyang Technological University, 259756, Singapore), AK(Nanyang Technological University, 259756, Singapore), AL(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AM(Nanyang Technological University, 259756, Singapore), AN(Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 117924, Russia), AO(Nanyang Technological University, 259756, Singapore), AP(Nanyang Technological University, 259756, Singapore)
Publication:
Physica Scripta, Volume 57, Issue 4, pp. 488-494 (1998).
Publication Date:
04/1998
Origin:
IOP
DOI:
10.1088/0031-8949/57/4/003
Bibliographic Code:
1998PhyS...57..488B

Abstract

A source of soft X-ray emission (9-14Å) based on the miniature 15kJ plasma focus was developed and tested. The X-ray emission was channelled along the chamber axis through an opening in the inner electrode (anode). A regime with a mean output of more than 100 J per discharge was found. At a discharge current of 280kA and repetition rate of 3.5Hz achieved by the device, its lifetime was estimated to be 107 commutations (about a year of continuous operation). A demonstration experiment on irradiation of an X-ray resist is discussed.
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